Figures and estimates
Figures and estimates of the different analysis techniques
Dynamic SIMS
Detection limit
1ppm-1ppb
Standard mass range
1uma-300uma
Profile depth
10nm-100µm
Depth resolution
1nm-20nm
Analysis area (diameter)
20µm-500µm
XPS/ECSA
Detection limit
0,1 at %
Detected elements
All except H and He
Analysis depth (without abrasion)
10nm
Minimum analysis area (diameter)
10µm
ToF-SIMS
Detection limit
1ppm
Mass range
1uma-10000uma
Analysis depth (without abrasion)
1nm
Imaging spatial resolution
0,1µm
RBS
Detection limit
1 at %
Mass range
M>10uma
Analysis depth
3nm-3µm
ECVP
Detection limit
1ppm-1ppb
Profile depth
10nm-10µm
Analysis area (diameter)
1mm-3mm