Comparisons
Caption:
- +++ good performance / adapted
- + limited performance / possibilities exist
- 0 unsuitable
| Detection limit | Alloys composition | Molecular information | Depth information | |
|---|---|---|---|---|
| SIMS dynamique | +++ | + | 0 | +++ |
| XPS/ESCA | + | +++ | + | + |
| ToF-SIMS | +++ | 0 | +++ | + |
| RBS | 0 | + | 0 | + |
| ECVP | +++ | 0 | 0 | +++ |
| FIB-TEM | Imaging on vertical sections of integrated circuits or other structures. | |||